Cangzhou, Hebei, China
Response Time: < 24h
Response Rate: 100%
Model No.: ZHDS400 | Place of Origin: China |
Product overview
1. Applicable: Universities, research institutes and enterprises conduct scientific research and small batch preparation of thin film new materials.
2. Product features/uses:
► Integrated equipment design, small footprint, favorable price, stable performance, low maintenance cost;
► The equipment is equipped with 4 to 6 sets of evaporation sources, compatible with organic evaporation and inorganic evaporation, multi-element co-evaporation to obtain composite film/separate evaporation to obtain multi-layer film, powerful and stable performance;
► It is suitable for the organic integration of evaporation coating and glove box environment, realizing the seamless connection of evaporation, packaging, testing and other processes, and is widely used in research systems such as perovskite solar cells/OPV organic solar cells and OLED thin films.
Technical parameters
Model |
ZHDS400 |
Coating method |
Multi-source evaporation coating |
Vacuum chamber structure |
Square box type front and rear doors; configuration glove box |
Vacuum chamber size |
L400×W440×H450mm |
Heating temperature |
Room temperature~300℃ |
Rotating substrate stage |
120mm×120mm |
Substrate stage lifting |
Manually adjust the lifting height from 0 to 80mm |
Film thickness unevenness |
≤±5.0% |
Evaporation source |
2 groups of metal sources, 2~4 groups of organic sources |
Control method |
PLC/PC automatic control system optional |
Area |
Host L1100×W780×H1800mm, customized glove box size |
Total Power |
≥10KW |